@article {21992,
	title = {Microstructure of β-FeSi2 buried layers synthesis by ion implantation},
	journal = {Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms },
	volume = {216},
	number = {1},
	year = {2004},
	pages = {137-142},
	abstract = {International Atomic Energy Agency (IAEA)},
	url = {https://doi.org/10.1016/j.nimb.2003.11.069},
	author = {R. Ayache and E. Richter and A. Bouabellou}
}
