@article {21996,
	title = {Optical characterization of β-FeSi2 layers formed by ion beam synthesis},
	journal = {Materials Science in Semiconductor Processing},
	volume = {7},
	number = {4-6},
	year = {2004},
	pages = {463-466},
	abstract = {

	TIB Technik/Naturwissenschaften (Science/Technology), TIB Conti-Campus sites (Social Sciences)

},
	url = {https://doi.org/10.1016/j.mssp.2004.09.099},
	author = {R. Ayache and A. Bouabellou and R. Richter}
}
