@article {22005,
	title = {Surface modification of Si(111) substrate by iron ion implantation: Growth of a thin {\ss}- FeSi2 layer},
	journal = {Review of Scientific Instruments},
	volume = {77},
	number = {3},
	year = {2006},
	pages = {03C108-03C108-3},
	abstract = {The SAO/NASA Astrophysics Data System},
	url = {https://doi.org/10.1063/1.2163886},
	author = {R. Ayache}
}
