<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">R. Ayache</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Effect of Ion Implantation Temperature on Formation of Nanometric β-FeSi&lt;sub&gt;2&lt;/sub&gt; Layer</style></title><secondary-title><style face="normal" font="default" size="100%">Advanced Engineering Technology and Application</style></secondary-title></titles><dates><year><style  face="normal" font="default" size="100%">2023</style></year></dates><urls><web-urls><url><style face="normal" font="default" size="100%">https://www.naturalspublishing.com/ContIss.asp?IssID=1963</style></url></web-urls></urls><volume><style face="normal" font="default" size="100%">12</style></volume><pages><style face="normal" font="default" size="100%">15-19</style></pages><language><style face="normal" font="default" size="100%">eng</style></language><abstract><style face="normal" font="default" size="100%">A nanometric buried layer of iron disilicide was synthesized by ion implantation in Si(1 1 1) p-type at different&amp;nbsp;temperatures using 195 keV Fe ions with a dose of &lt;span class=&quot;math-tex&quot;&gt;\(2\)&lt;/span&gt;.&lt;span class=&quot;math-tex&quot;&gt;\(10^{17}\)&lt;/span&gt;&lt;span class=&quot;math-tex&quot;&gt;\(Fe^{+}/cm^{2}\)&lt;/span&gt;. The investigation of the phase composition is carried out by&lt;br&gt;Rutherford backscattering spectrometry (RBS), whereas the structural characterization is obtained by X-ray diffraction (XRD) pole&amp;nbsp;figure. The process of the silicidation has been investigated at a function of the ion implantation temperatures ranging from 200 to&amp;nbsp;440 °C. The precipitates favor epitaxial growth with respect to Si(1 1 1) planes with epitaxial relationships &lt;span class=&quot;math-tex&quot;&gt;\( \beta\)&lt;/span&gt;-FeSi&lt;span class=&quot;math-tex&quot;&gt;\(_{2}\)&lt;/span&gt;(2 2 0) //Si(1 1 1) and/or &lt;span class=&quot;math-tex&quot;&gt;\(\beta\)&lt;/span&gt;-FeSi&lt;span class=&quot;math-tex&quot;&gt;\(_{2}\)&lt;/span&gt; (2 0 2) // Si(1 1 1).&lt;br&gt;&amp;nbsp;</style></abstract><issue><style face="normal" font="default" size="100%">3</style></issue></record></records></xml>